半導體-典型去離子水處理系統
SEMI-CONDUCTOR-Typical Deionized Water Treatment System
Water Source 水源 |
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Sand Bed 沙床 |
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Prefilter 前置過濾 |
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RO Unit 逆滲透 |
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Primary Ion Exchange 初步離子交換 |
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Filter 過濾 |
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Storage 儲存 |
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Point of Use 水之 |
Post-UV Filter 紫外線後置過濾 |
UV 紫外線殺菌 |
Post Polish Filter 後置精緻過濾 |
Polishing Ion Exchange 精緻離子交換
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Note:Variations of the above system exist depending on situational requirement
超純水工程規範書
一原水水質 | |||
pH(酸鹼值) | 7.6 | ||
M-Alkalimty(總鹼度) | 150 ppm as CaCO3 | ||
Total-Fe(總鐵份) | 0.1 ppm as Fe- | ||
Total-Hardness(總硬度) | 290 ppm as CaCO3 | ||
Cl- (氯離子) | 55 ppm as Cl- | ||
SO3(硫酸根) | 50 ppm as SO42- | ||
SiO2(矽酸鹽) | 12 ppm as SiO2 | ||
二處理後水質 | |||
軟水水質 |
Total-Hardness(總硬度) | 5 ppm as CaCO3 | |
RO 純水水質 |
去除率 | >98% | |
採水率(recovery %) | 80%↑ | ||
pH(酸鹼值) | 6.5~7.0 | ||
Resistivity (比電阻) | 0.1~0.05↑Megaohm-cm | ||
CIP日期間隔 | 一年↑ | ||
超純水水質(循環用水) | pH(酸鹼值) | 6.5~7.0 | |
Resistivity (比電阻) | 1.7↑Megahohm-cm | ||
細菌數 | <100up/100ml | ||
TOC | <200ppb | ||
微粒子數值(>0.2μ) | <50個/ml | ||
三處理水量 | |||
過濾水 | 15m3/hr*24hr/day=360m3/day | ||
軟化水 | 15m3/hr*24hr/day/cycle=360m3/day | ||
RO純水 | 10m3/hr*24hr/day=240m3/day | ||
MB純水 | 10m3/hr*100hr/cycle=1000m3/cycle | ||
超純水 | 10m3/hr*3600hr/batch=36000m3/batch |
( Electrochemical Deionization , EDI )
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